https://www.sciencedirect.com/science/article/pii/S1567173926002397 Abstract For EUV lithography, reliable actinic photoresist evaluation is essential for addressing stochastic variation and secondary-electron-driven reactions. Here, we present a laboratory-scale EUV photoresist sensitivity measurement (EPSM) system based on a femtosecond high-harmonic generation (HHG) source delivering 13.5 nm actinic EUV radiation. To overcome the intrinsically low photon flux and tightly focused Gaussian...

*****그래픽랩은 해당 이미지에서 빨간색 라인 표기 영역 이미지를 작업하였습니다. 논문 개요 파악을 위해 Figure 전체 세트로 유첨하였습니다.**** https://advanced.onlinelibrary.wiley.com/doi/10.1002/adma.74328 ABSTRACT Wearable interfaces that capture both weak physiological fluctuations and large body motions remain difficult to realize in a single fiber because most strain-sensing fibers are governed by one dominant electromechanical response mode. Consequently, mechanically distinct deformation regimes are ambiguously represented, limiting...

https://www.sciencedirect.com/science/article/pii/S2772656826000795 Abstract The design of high-performance and cost-effective solid sorbents remains a critical challenge for the large-scale deployment of silica-based direct air capture (DAC) technologies. While silica-supported amine sorbents are leading candidates, conventional precursors impose substantial environmental and economic burdens, which limits their applicability. Herein, we report a cost-effective and sustainable...